TECHNOLOGY AND MEASUREMENTS OF MAGNETORESISTANCE IN THIN-LAYERED FERROMAGNETIC STRUCTURES


Abstract

The paper presents the technology for obtaining NiFe/Ti/NiFe layer structures in MEMS technology using magnetron purge with the assumption of being used as semi-magnetic sensors. A series of samples was made on a glass substrate with a sandwich structure, where the individual layers were 100 nm NiFe, 10 nm Ti and on top again NiFe with a thickness of 100 nm. Measurements of DC resistance of the obtained structures in a constant magnetic field, which was produced by neodymium magnets and an electromagnet, were carried out. The obtained results confirm the occurrence of phenomena known as the magnetoresistance effect. The influence of the spatial arrangement of structures relative to the constant magnetic field vector was checked and proved.


Keywords

static magnetic field; magnetron sputtering; MEMS; magnetoresistance

Chen L., Zhou Y., Lei C., Zhou Z. M., Ding W.: Giant magnetoimpedance effect in sputtered single layered NiFe film and meander NiFe/Cu/NiFe film. Journal of Magnetism and Magnetic Materials 322(19)/2010, 2834–2839, [http://doi.org/10.1016/j.jmmm.2010.04.038]. DOI: https://doi.org/10.1016/j.jmmm.2010.04.038

Chen L., Zhou Y., Lei C., Zhou Z. M.: Effect of sputtering parameters and sample size on giant magnetoimpedance effect in NiFe and NiFe/Cu/NiFe films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 172(2)/2010, 101–107, [http://doi.org/10.1016/j.mseb.2010.04.026]. DOI: https://doi.org/10.1016/j.mseb.2010.04.026

Dixit G., Singh J. P., Srivastava R. C., Agrawal H. M., Choudhary R. J., Ajay G.: Structural and magnetic behaviour of NiFe2O4 thin film grown by pulsed laser deposition. Indian Journal of Pure & Applied Physics 48(4)/2010, 287–291.

Djamal M., Ramli: Development of sensors based on giant magnetoresistance material. Procedia Engineering 32/2012, 60–68, [http://doi.org/10.1016/j.proeng.2012.01.1237]. DOI: https://doi.org/10.1016/j.proeng.2012.01.1237

Ennen I., Kappe D., Rempel T., Glenske C., Hütten A.: Giant Magnetoresistance: Basic concepts, microstructure, magnetic interactions and applications. Sensors 16/2016, [http://doi.org/10.3390/s16060904]. DOI: https://doi.org/10.3390/s16060904

Esmaili S., Bahrololoom M. E., Zamani C.: Electrodeposition of NiFe/Cu multilayers from a single bath. Surface Engineering and Applied Electrochemistry 47(2)/2011, 107–111, [http://doi.org/10.3103/S1068375511020049]. DOI: https://doi.org/10.3103/S1068375511020049

Fernandez G. V., Grundy P. J., Vopson M. M.: Control and Analysis of Grain Size in Sputtered NiFe Thin Films. Journal of Condensed Matter Physics 1(1)/2013, 6–9. DOI: https://doi.org/10.12966/jcmp.08.02.2013

García-Arribas A., Fernández E., Svalov A., Kurlyandskaya G. V., Barandiaran J. M.: Thin-film magneto-impedance structures with very large sensitivity. Journal of Magnetism and Magnetic Materials 400/2016, 321–326, [http://doi.org/10.1016/j.jmmm.2015.07.107]. DOI: https://doi.org/10.1016/j.jmmm.2015.07.107

Gijs M. A. M.: Magnetic bead handling on-chip: New opportunities for analytical applications. Microfluidics and Nanofluidics 1/2004, 22–40, [http://doi.org/10.1007/s10404-004-0010-y]. DOI: https://doi.org/10.1007/s10404-004-0010-y

Gupta N., Verma A., Kashyap S. C., Dube D. C.: Dielectric behavior of spin-deposited nanocrystalline nickel-zinc ferrite thin films processed by citrate-route. Solid State Communications 134(10)/2005, 689–694, [http://doi.org/10.1016/j.ssc.2005.02.037]. DOI: https://doi.org/10.1016/j.ssc.2005.02.037

Hall D. A., Gaster R. S., Lin T., Osterfeld S. J., Han S., Murmann B., Wang S. X.: GMR biosensor arrays: A system perspective. Biosensors and Bioelectronics 25(9)/2010, 2051–2057, [http://doi.org/10.1016/j.bios.2010.01.038]. DOI: https://doi.org/10.1016/j.bios.2010.01.038

Jogschies L., Klaas D., Kruppe R., Rittinger J., Taptimthong P., Wienecke A., Wurz M. C.: Recent developments of magnetoresistive sensors for industrial applications. Sensors 15/2015, 28665–28689, [http://doi.org/10.3390/s151128665]. DOI: https://doi.org/10.3390/s151128665

Kurlyandskaya G. V., Fernández E., Svalov A., Burgoa Beitia A., García-Arribas A., Larranaga A.: Flexible thin film magnetoimpedance sensors. Journal of Magnetism and Magnetic Materials 415/2016, 91–96, [http://doi.org/10.1016/j.jmmm.2016.02.004]. DOI: https://doi.org/10.1016/j.jmmm.2016.02.004

Kuru H., Kockar H., Alper M.: Giant magnetoresistance (GMR) behavior of electrodeposited NiFe/Cu multilayers: Dependence of non-magnetic and magnetic layer thicknesses. Journal of Magnetism and Magnetic Materials 444/2017, 132–139, [http://doi.org/10.1016/j.jmmm.2017.08.019]. DOI: https://doi.org/10.1016/j.jmmm.2017.08.019

Lai C. H., Matsuyama H., White R. L., Anthony T. C., Matsuyama H.: Anisotropic Exchange for NiFe Films Grown on Epitaxial NiO. IEEE Transactions on Magnetics 31(6)/1995, 2609–2611, [http://doi.org/10.1109/20.490068]. DOI: https://doi.org/10.1109/20.490068

Makhnovskiy D. P., Panina L. V., Fry N., Mapps D. J.: Magneto-impedance in NiFe/Au/NiFe sandwich films with different types of anisotropy. Journal of Magnetism and Magnetic Materials 272–276(III)/2004, 1866–1867, [http://doi.org/10.1016/j.jmmm.2003.12.833]. DOI: https://doi.org/10.1016/j.jmmm.2003.12.833

Motomura Y., Tatsumi T., Urai H., Aoyama M.: Soft Magnetic Properties and Heat Stability for Fe/NiFe Superlattices. IEEE Transactions on Magnetics 26(5)/1990, 2327–2331, [http://doi.org/10.1109/20.104714]. DOI: https://doi.org/10.1109/20.104714

Phani A. R., Santucci S.: Structural characterization of nickel titanium oxide synthesized by sol-gel spin coating technique. Thin Solid Films 396/2001, 1–4, [http://doi.org/10.1016/S0040-6090(01)01131-2]. DOI: https://doi.org/10.1016/S0040-6090(01)01131-2

Reig C., Cubells-Beltrán M.-D., Ramírez Munoz D.: Magnetic Field Sensors Based on Giant Magnetoresistance (GMR) Technology: Applications in Electrical Current Sensing. Sensors 9(10)/2009, 7919–7942, [http://doi.org/10.3390/s91007919]. DOI: https://doi.org/10.3390/s91007919

Svalov A. V., Larranaga A., Kurlyandskaya G. V.: Effect of Ti seed and spacer layers on structure and magnetic properties of FeNi thin films and FeNi-based multilayers. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 188/2014, 102–105, [http://doi.org/10.1016/j.mseb.2014.06.006]. DOI: https://doi.org/10.1016/j.mseb.2014.06.006

Zhao C. J., Wu Z. L., Zhao Z. D., Ding L., Lu X. A., Li X. J., Yu G. H.: Influence on the transport behaviors of spin-polarized electrons exerted by MgO/NiFe and NiFe/MgO heterointerfaces. Journal of Magnetism and Magnetic Materials 368/2014, 59–63, [http://doi.org/10.1016/j.jmmm.2014.05.013]. DOI: https://doi.org/10.1016/j.jmmm.2014.05.013

Zhao Z. D., Li M. H., Zhao C. J., Yang G., Zhang J. Y., Jiang S. L., Yu G. H.: Large enhancement of magnetoresistance in NiFe film with MgO layers sandwiched after annealing. Applied Surface Science 321/2014, 554–559, [http://doi.org/10.1016/j.apsusc.2014.10.047]. DOI: https://doi.org/10.1016/j.apsusc.2014.10.047

Download

Published : 2020-03-30


Kisała, J., Czarnacka, K., Gęca, M., & Kociubiński, A. (2020). TECHNOLOGY AND MEASUREMENTS OF MAGNETORESISTANCE IN THIN-LAYERED FERROMAGNETIC STRUCTURES. Informatyka, Automatyka, Pomiary W Gospodarce I Ochronie Środowiska, 10(1), 44-47. https://doi.org/10.35784/iapgos.896

Jakub Kisała 
Lublin University of Technology  Poland
Karolina Czarnacka 
University of Life Sciences in Lublin  Poland
http://orcid.org/0000-0003-1434-734X
Mateusz Gęca 
Lublin University of Technology  Poland
https://orcid.org/0000-0002-0519-7389
Andrzej Kociubiński  akociub@semiconductor.pl
Lublin University of Technology  Poland
https://orcid.org/0000-0002-0377-8243