TECHNOLOGY AND MEASUREMENTS OF MAGNETORESISTANCE IN THIN-LAYERED FERROMAGNETIC STRUCTURES

Jakub Kisała


Lublin University of Technology (Poland)

Karolina Czarnacka


University of Life Sciences in Lublin (Poland)
http://orcid.org/0000-0003-1434-734X

Mateusz Gęca


Lublin University of Technology (Poland)
https://orcid.org/0000-0002-0519-7389

Andrzej Kociubiński

akociub@semiconductor.pl
Lublin University of Technology (Poland)
https://orcid.org/0000-0002-0377-8243

Abstract

The paper presents the technology for obtaining NiFe/Ti/NiFe layer structures in MEMS technology using magnetron purge with the assumption of being used as semi-magnetic sensors. A series of samples was made on a glass substrate with a sandwich structure, where the individual layers were 100 nm NiFe, 10 nm Ti and on top again NiFe with a thickness of 100 nm. Measurements of DC resistance of the obtained structures in a constant magnetic field, which was produced by neodymium magnets and an electromagnet, were carried out. The obtained results confirm the occurrence of phenomena known as the magnetoresistance effect. The influence of the spatial arrangement of structures relative to the constant magnetic field vector was checked and proved.


Keywords:

static magnetic field, magnetron sputtering, MEMS, magnetoresistance

Chen L., Zhou Y., Lei C., Zhou Z. M., Ding W.: Giant magnetoimpedance effect in sputtered single layered NiFe film and meander NiFe/Cu/NiFe film. Journal of Magnetism and Magnetic Materials 322(19)/2010, 2834–2839, [http://doi.org/10.1016/j.jmmm.2010.04.038].
DOI: https://doi.org/10.1016/j.jmmm.2010.04.038   Google Scholar

Chen L., Zhou Y., Lei C., Zhou Z. M.: Effect of sputtering parameters and sample size on giant magnetoimpedance effect in NiFe and NiFe/Cu/NiFe films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 172(2)/2010, 101–107, [http://doi.org/10.1016/j.mseb.2010.04.026].
DOI: https://doi.org/10.1016/j.mseb.2010.04.026   Google Scholar

Dixit G., Singh J. P., Srivastava R. C., Agrawal H. M., Choudhary R. J., Ajay G.: Structural and magnetic behaviour of NiFe2O4 thin film grown by pulsed laser deposition. Indian Journal of Pure & Applied Physics 48(4)/2010, 287–291.
  Google Scholar

Djamal M., Ramli: Development of sensors based on giant magnetoresistance material. Procedia Engineering 32/2012, 60–68, [http://doi.org/10.1016/j.proeng.2012.01.1237].
DOI: https://doi.org/10.1016/j.proeng.2012.01.1237   Google Scholar

Ennen I., Kappe D., Rempel T., Glenske C., Hütten A.: Giant Magnetoresistance: Basic concepts, microstructure, magnetic interactions and applications. Sensors 16/2016, [http://doi.org/10.3390/s16060904].
DOI: https://doi.org/10.3390/s16060904   Google Scholar

Esmaili S., Bahrololoom M. E., Zamani C.: Electrodeposition of NiFe/Cu multilayers from a single bath. Surface Engineering and Applied Electrochemistry 47(2)/2011, 107–111, [http://doi.org/10.3103/S1068375511020049].
DOI: https://doi.org/10.3103/S1068375511020049   Google Scholar

Fernandez G. V., Grundy P. J., Vopson M. M.: Control and Analysis of Grain Size in Sputtered NiFe Thin Films. Journal of Condensed Matter Physics 1(1)/2013, 6–9.
DOI: https://doi.org/10.12966/jcmp.08.02.2013   Google Scholar

García-Arribas A., Fernández E., Svalov A., Kurlyandskaya G. V., Barandiaran J. M.: Thin-film magneto-impedance structures with very large sensitivity. Journal of Magnetism and Magnetic Materials 400/2016, 321–326, [http://doi.org/10.1016/j.jmmm.2015.07.107].
DOI: https://doi.org/10.1016/j.jmmm.2015.07.107   Google Scholar

Gijs M. A. M.: Magnetic bead handling on-chip: New opportunities for analytical applications. Microfluidics and Nanofluidics 1/2004, 22–40, [http://doi.org/10.1007/s10404-004-0010-y].
DOI: https://doi.org/10.1007/s10404-004-0010-y   Google Scholar

Gupta N., Verma A., Kashyap S. C., Dube D. C.: Dielectric behavior of spin-deposited nanocrystalline nickel-zinc ferrite thin films processed by citrate-route. Solid State Communications 134(10)/2005, 689–694, [http://doi.org/10.1016/j.ssc.2005.02.037].
DOI: https://doi.org/10.1016/j.ssc.2005.02.037   Google Scholar

Hall D. A., Gaster R. S., Lin T., Osterfeld S. J., Han S., Murmann B., Wang S. X.: GMR biosensor arrays: A system perspective. Biosensors and Bioelectronics 25(9)/2010, 2051–2057, [http://doi.org/10.1016/j.bios.2010.01.038].
DOI: https://doi.org/10.1016/j.bios.2010.01.038   Google Scholar

Jogschies L., Klaas D., Kruppe R., Rittinger J., Taptimthong P., Wienecke A., Wurz M. C.: Recent developments of magnetoresistive sensors for industrial applications. Sensors 15/2015, 28665–28689, [http://doi.org/10.3390/s151128665].
DOI: https://doi.org/10.3390/s151128665   Google Scholar

Kurlyandskaya G. V., Fernández E., Svalov A., Burgoa Beitia A., García-Arribas A., Larranaga A.: Flexible thin film magnetoimpedance sensors. Journal of Magnetism and Magnetic Materials 415/2016, 91–96, [http://doi.org/10.1016/j.jmmm.2016.02.004].
DOI: https://doi.org/10.1016/j.jmmm.2016.02.004   Google Scholar

Kuru H., Kockar H., Alper M.: Giant magnetoresistance (GMR) behavior of electrodeposited NiFe/Cu multilayers: Dependence of non-magnetic and magnetic layer thicknesses. Journal of Magnetism and Magnetic Materials 444/2017, 132–139, [http://doi.org/10.1016/j.jmmm.2017.08.019].
DOI: https://doi.org/10.1016/j.jmmm.2017.08.019   Google Scholar

Lai C. H., Matsuyama H., White R. L., Anthony T. C., Matsuyama H.: Anisotropic Exchange for NiFe Films Grown on Epitaxial NiO. IEEE Transactions on Magnetics 31(6)/1995, 2609–2611, [http://doi.org/10.1109/20.490068].
DOI: https://doi.org/10.1109/20.490068   Google Scholar

Makhnovskiy D. P., Panina L. V., Fry N., Mapps D. J.: Magneto-impedance in NiFe/Au/NiFe sandwich films with different types of anisotropy. Journal of Magnetism and Magnetic Materials 272–276(III)/2004, 1866–1867, [http://doi.org/10.1016/j.jmmm.2003.12.833].
DOI: https://doi.org/10.1016/j.jmmm.2003.12.833   Google Scholar

Motomura Y., Tatsumi T., Urai H., Aoyama M.: Soft Magnetic Properties and Heat Stability for Fe/NiFe Superlattices. IEEE Transactions on Magnetics 26(5)/1990, 2327–2331, [http://doi.org/10.1109/20.104714].
DOI: https://doi.org/10.1109/20.104714   Google Scholar

Phani A. R., Santucci S.: Structural characterization of nickel titanium oxide synthesized by sol-gel spin coating technique. Thin Solid Films 396/2001, 1–4, [http://doi.org/10.1016/S0040-6090(01)01131-2].
DOI: https://doi.org/10.1016/S0040-6090(01)01131-2   Google Scholar

Reig C., Cubells-Beltrán M.-D., Ramírez Munoz D.: Magnetic Field Sensors Based on Giant Magnetoresistance (GMR) Technology: Applications in Electrical Current Sensing. Sensors 9(10)/2009, 7919–7942, [http://doi.org/10.3390/s91007919].
DOI: https://doi.org/10.3390/s91007919   Google Scholar

Svalov A. V., Larranaga A., Kurlyandskaya G. V.: Effect of Ti seed and spacer layers on structure and magnetic properties of FeNi thin films and FeNi-based multilayers. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 188/2014, 102–105, [http://doi.org/10.1016/j.mseb.2014.06.006].
DOI: https://doi.org/10.1016/j.mseb.2014.06.006   Google Scholar

Zhao C. J., Wu Z. L., Zhao Z. D., Ding L., Lu X. A., Li X. J., Yu G. H.: Influence on the transport behaviors of spin-polarized electrons exerted by MgO/NiFe and NiFe/MgO heterointerfaces. Journal of Magnetism and Magnetic Materials 368/2014, 59–63, [http://doi.org/10.1016/j.jmmm.2014.05.013].
DOI: https://doi.org/10.1016/j.jmmm.2014.05.013   Google Scholar

Zhao Z. D., Li M. H., Zhao C. J., Yang G., Zhang J. Y., Jiang S. L., Yu G. H.: Large enhancement of magnetoresistance in NiFe film with MgO layers sandwiched after annealing. Applied Surface Science 321/2014, 554–559, [http://doi.org/10.1016/j.apsusc.2014.10.047].
DOI: https://doi.org/10.1016/j.apsusc.2014.10.047   Google Scholar

Download


Published
2020-03-30

Cited by

Kisała, J., Czarnacka, K., Gęca, M., & Kociubiński, A. (2020). TECHNOLOGY AND MEASUREMENTS OF MAGNETORESISTANCE IN THIN-LAYERED FERROMAGNETIC STRUCTURES. Informatyka, Automatyka, Pomiary W Gospodarce I Ochronie Środowiska, 10(1), 44–47. https://doi.org/10.35784/iapgos.896

Authors

Jakub Kisała 

Lublin University of Technology Poland

Authors

Karolina Czarnacka 

University of Life Sciences in Lublin Poland
http://orcid.org/0000-0003-1434-734X

Authors

Mateusz Gęca 

Lublin University of Technology Poland
https://orcid.org/0000-0002-0519-7389

Authors

Andrzej Kociubiński 
akociub@semiconductor.pl
Lublin University of Technology Poland
https://orcid.org/0000-0002-0377-8243

Statistics

Abstract views: 481
PDF downloads: 288


Most read articles by the same author(s)